Kaltenbacher, Manfred.
Numerical simulation of mechatronic sensors and actuators : finite elements for computational multiphysics /
Manfred Kaltenbacher.
- 3rd ed.
- Berlin, Heidelberg : Springer- Verlag, 2015.
- xxvii, 587 p. : ill., graphs, charts, diagrs.
Includes bibliographical references.
97836420401695
Microelectromechanical systems.
Mechatronics.
Finite element method.
TK7875 / K35 2015