| 000 -LEADER |
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| fixed length control field |
00610nam a22001697a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20160517084015.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
160517b xxu||||| |||| 00| 0 eng d |
| 040 ## - CATALOGING SOURCE |
|---|
| Transcribing agency |
UG |
| 050 ## - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TS695.15 |
| Item number |
i58 |
| 111 ## - MAIN ENTRY--MEETING NAME |
|---|
| Meeting name or jurisdiction name as entry element |
International Conference on Chemical Vapor Deposition (10th : 1987: Japan) |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Proceedings... / |
| Statement of responsibility, etc |
edited by G.W. Cullen. - |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
Pennington,N.J. : |
| Name of publisher, distributor, etc |
The Electrochemical Society, |
| Date of publication, distribution, etc |
1987 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xvi,1269 p. : |
| Other physical details |
ill. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Plasma-enhanced chemical vapor deposition. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Entry Department |
Law and Social Science |
| Source of classification or shelving scheme |
|