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Plasma deposition of amorphous silicon-based materials
Publication:
Boston : Academic Press, 1995
. 1 online resource (xi, 324 p.) :
Date:1995
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Beam technologies for integrated processing
Publication:
Washington, D.C. : National Academy Press, 1992
. 1 online resource (xii, 89 p.) :
, "NMAB-461."
Date:1992
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Proceedings... /
by International Conference on Chemical Vapor Deposition (10th : 1987: Japan)
Publication:
Pennington,N.J. : The Electrochemical Society, 1987
. xvi,1269 p. :
Date:1987
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Turkeyen Campus
Science & Technology
[TS695.15 i58]
(1),
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