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Numerical simulation of mechatronic sensors and actuators :

by Kaltenbacher, Manfred.
Edition statement:3rd ed. Published by : Springer- Verlag, (Berlin, Heidelberg : ) Physical details: xxvii, 587 p. : ill., graphs, charts, diagrs. ISBN: 97836420401695. Subject(s): Microelectromechanical systems. | Mechatronics. | Finite element method. Year: 2015
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